Three-dimensional patterning in polymer optical waveguides using focused ion beam milling
نویسندگان
چکیده
منابع مشابه
Nanometer scale patterning using focused ion beam milling
Publisher's copyright statement: Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in (Petit, D. and Faulkner, C. C. and Johnstone, S. and Wood, D. and Cowburn, R. P. (2005) Nanometer scale patterning using focused ion be...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2016
ISSN: 1932-5150
DOI: 10.1117/1.jmm.15.3.034505